Abstract

Microcantilever has been proven as an outstanding platform for extremely sensitive chemical and biological
sensors. Microelectromechanical system (MEMS) cantilever-based sensor is becoming popular in recent years
due to its high sensitivity, high selectivity, easy to fabricate and can be easily integrated with on-chip electronic
circuitry. In this work, optimization of material and structure for MEMS-based microcantilever used for biosensor
application was done using dynamic mode sensing concept. The analysis was carried out for different types of
materials with different structures. The simulation was done using COMSOL multiphysics finite element analysis
software and was analyzed with solid mechanics principle. The microcantilever materials used for analysis are
silicon, polyvinylidene fluoride, silicon nitride, and SU8.